Advanced Micro Systems

Motorized Stages:

• Leadscrew / Ballscrew configurations

• Open or Closed Loop Control

• Servo, Stepper, rotary or Voice Coil Designs

Travel:

• -  5mm to 600mm

• - Partial Arc rotary

• - High speed rotary

Geometric:

• Straightness: +/- 0.001% of travel

• Flatness:        +/- 0.001% of travel

• Repeatability : < 0.5 um

• Accuracy:      +/- 0.005% of travel

• Orthagonality: < 10 arc-sec standard,  < 5 arc-sec available.

Transmitted Stages:

• Precision adjustable glass stage plate. 

  • includes sub-stage optics and illumination mirror assembly.

Manual Stages:

• Coarse / Fine Manual Adjustments

  • Coarse:  0.5" lead

  • Fine:       0.025" lead

Measuring Scales:

• Encoder resolutions down to 50nm.